The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 29, 2022
Filed:
Mar. 06, 2019
Applicant:
Texas Instruments Incorporated, Dallas, TX (US);
Inventors:
Earl Vedere Atnip, Plano, TX (US);
John Wesley Hamlin, Dallas, TX (US);
Win Jae Jessie Yuan, Dallas, TX (US);
Assignee:
TEXAS INSTRUMENTS INCORPORATED, Dallas, TX (US);
Primary Examiner:
Int. Cl.
CPC ...
B81B 3/00 (2006.01); B81C 1/00 (2006.01); G02B 26/08 (2006.01);
U.S. Cl.
CPC ...
B81B 3/007 (2013.01); B81C 1/00658 (2013.01); G02B 26/0833 (2013.01); B81B 2201/042 (2013.01); B81B 2207/07 (2013.01); B81C 2201/0109 (2013.01); B81C 2201/0132 (2013.01); B81C 2201/0176 (2013.01);
Abstract
Described examples include a micromechanical device having a substrate. The micromechanical device includes a MEMS element and a via between the MEMS element and the substrate, the via having a conductive layer extending from the substrate to the MEMS element and having a structural integrity layer on the conductive layer.