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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11511920 B1

PDFFull Text
Date of Patent:
Nov. 29, 2022

Filed:

Jul. 15, 2020

Sealed reticle storage device with soft contact

Applicant:

Gudeng Precision Industrial Co., Ltd., New Taipei, TW;

Inventors:

Chia-Ho Chuang, New Taipei, TW;

Hsin-Min Hsueh, New Taipei, TW;

Yi-Hsuan Lee, New Taipei, TW;

Hsing-Min Wen, New Taipei, TW;

Ming-Chien Chiu, New Taipei, TW;

Assignee:

GUDENG PRECISION INDUSTRIAL CO., LTD., New Taipei, TW;

Attorneys:

Locke Lord LLP

Tim Tingkang Xia, Esq.

Primary Examiner:

Rafael A Ortiz

Int. Cl.
CPC ...
B65D 53/06 (2006.01); B65D 85/38 (2006.01); G03F 1/66 (2012.01); H01L 21/673 (2006.01); B01D 46/00 (2022.01); B01D 46/42 (2006.01); B01D 46/54 (2006.01); F16K 27/02 (2006.01); B65D 81/24 (2006.01); B65D 85/30 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
B65D 53/06 (2013.01); B01D 46/001 (2013.01); B01D 46/4272 (2013.01); B01D 46/543 (2013.01); B65D 81/24 (2013.01); B65D 85/30 (2013.01); B65D 85/38 (2013.01); F16K 27/02 (2013.01); G03F 1/66 (2013.01); G03F 7/70916 (2013.01); H01L 21/67359 (2013.01); H01L 21/67389 (2013.01); B01D 2271/027 (2013.01); B01D 2279/51 (2013.01);
Abstract

The invention discloses a reticle storage device including a top lid, a bottom lid and a soft contact member. The top lid has a ceiling and a cover surrounding the ceiling. The bottom lid has a carrier and a peripheral structure surrounding the carrier. The soft contact member is configured to laterally extend in between the cover and the peripheral structure when the top lid and the bottom lid engage with each other, and to extend from an inside to an outside of the device in order to buffer the contact among the two lids.

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