The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 29, 2022
Filed:
Oct. 23, 2019
Semes Co., Ltd., Cheonan-si, KR;
Young Jin Kim, Seoul, KR;
Jin Tack Yu, Asan-si, KR;
Bu Young Jung, Cheonan-si, KR;
Byung Sun Bang, Hwaseong-si, KR;
Seung Hoon Oh, Cheonan-si, KR;
Young Jun Choi, Asan-si, KR;
Jong Hyeon Woo, Asan-si, KR;
SEMES CO., LTD., Cheonan-si, KR;
Abstract
A substrate processing method includes forming a high surface tension liquid film by supplying high surface tension liquid on a substrate surface, replacing the high surface tension liquid film with low surface tension liquid by supplying the low surface tension liquid to a center area of a substrate so that the low surface tension liquid impinges on the high surface tension liquid film formed on the center area of the substrate, and supplying high surface tension liquid for a predetermined period of time during the supplying the low surface tension liquid.