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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11509277 B1

PDFFull Text
Date of Patent:
Nov. 22, 2022

Filed:

Mar. 28, 2019

Piezoelectric single crystal silicon carbide microelectromechanical resonators

Applicant:

Hrl Laboratories, Llc, Malibu, CA (US);

Inventors:

Raviv Perahia, Malibu, CA (US);

Logan D. Sorenson, Malibu, CA (US);

Lian X. Huang, Malibu, CA (US);

Jeremy Bregman, Malibu, CA (US);

Assignee:

HRL LABORATORIES, LLC, Malibu, CA (US);

Attorney:

Ladas & Parry, LLP

Primary Examiner:

Jeffrey M Shin

Int. Cl.
CPC ...
H03H 3/02 (2006.01); H03H 9/205 (2006.01); H03H 9/02 (2006.01); H03H 9/05 (2006.01); H03H 9/13 (2006.01); H03H 9/17 (2006.01); H03H 9/15 (2006.01);
U.S. Cl.
CPC ...
H03H 3/02 (2013.01); H03H 9/02031 (2013.01); H03H 9/02228 (2013.01); H03H 9/0519 (2013.01); H03H 9/132 (2013.01); H03H 9/176 (2013.01); H03H 9/205 (2013.01); H03H 2003/027 (2013.01); H03H 2009/155 (2013.01);
Abstract

A resonator has a resonator body and a frame at least partially surrounding the resonator body, the resonator body being coupled to the frame by at least one tether. The resonator body, frame and at least one tether comprise silicon carbide. A plurality of interdigitated electrodes are disposed on the silicon carbide resonator body. The resonator body preferably comprises 6H silicon carbide and preferably has a crystalline c-axis oriented generally parallel to a thickness direction of the resonator body.

Find Patent Forward Citations

Perahia, Raviv. (2022). Piezoelectric single crystal silicon carbide microelectromechanical resonators (U.S. Patent No. 11509277). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11509277

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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