The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 22, 2022

Filed:

Jan. 28, 2020
Applicant:

University of Florida Research Foundation, Incorporated, Gainesville, FL (US);

Inventors:

Haoting Shen, Tallahassee, FL (US);

Navid Asadizanjani, Gainesville, FL (US);

Domenic J. Forte, Gainesville, FL (US);

Mark M. Tehranipoor, Gainesville, FL (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 31/0236 (2006.01); H01L 23/00 (2006.01); H01L 21/768 (2006.01); H01L 23/532 (2006.01); G01R 31/311 (2006.01);
U.S. Cl.
CPC ...
H01L 31/02363 (2013.01); H01L 21/76807 (2013.01); H01L 23/53238 (2013.01); H01L 24/05 (2013.01); G01R 31/311 (2013.01); H01L 2924/14 (2013.01);
Abstract

A pyramid structure to mitigate optical probing attacks in ICs by scrambling the measurements reflected by a laser pulse is disclosed. The pyramid structure is applied to selected areas at the bottom surface of the metal traces in metal layer to circumvent the extra silicon layer and thus minimize the changes to the conventional device structures. The pyramid structure includes randomized pyramids at nanometer scale. Optical simulation results show the pyramidized metal surface is able to prevent optical probing attacks. The fabrication of pyramids is CMOS compatible as well. Optical simulations are performed to analyze the impact these nano-scaled pyramids in a laser voltage probing attacking model. The nanopyramid can disturb the optical measurements enough to make the attacks practically infeasible. In addition, the nanopyramid structure countermeasure works in a passive mode without consuming any energy.


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