The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 22, 2022

Filed:

Apr. 06, 2018
Applicant:

Ngk Spark Plug Co., Ltd., Nagoya, JP;

Inventor:

Kaname Miwa, Nagoya, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01L 21/67 (2006.01); H05B 1/02 (2006.01); H05B 3/28 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6833 (2013.01); H01L 21/67248 (2013.01); H01L 21/683 (2013.01); H05B 1/0233 (2013.01); H05B 3/283 (2013.01); H05B 2213/07 (2013.01);
Abstract

A holding device includes: a plate-shaped member having a first surface approximately orthogonal to a first direction; heat generating resistors and temperature measuring resistors disposed in respective segments formed by virtually dividing at least part of the plate-shaped member, the segments being arranged in a direction orthogonal to the first direction; and an electricity supply section that forms electricity supply paths for the heat generating resistors and the temperature measuring resistors. The holding device holds an object on the first surface of the plate-shaped member. The position of the temperature measuring resistors in the first direction differs from the position of the heat generating resistors in the first direction. A specific temperature measuring resistor that is at least one of the temperature measuring resistors includes a plurality of resistor elements disposed at different positions in the first direction and connected to one another in series.


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