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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11508595 B1

PDFFull Text
Date of Patent:
Nov. 22, 2022

Filed:

Aug. 24, 2017

Apparatus and method for contactless transportation of a device in a vacuum processing system

Applicants:

Applied Materials, Inc., Santa Clara, CA (US);

Henning Aust, Mühltal, DE;

Jörg Schuler, Wiesbaden, DE;

Inventors:

Henning Aust, Mühltal, DE;

Jörg Schuler, Wiesbaden, DE;

Assignee:

APPLIED MATERIALS, INC., Santa Clara, CA (US);

Attorney:

Patterson + Sheridan, LLP

Primary Examiner:

Thomas Randazzo

Int. Cl.
CPC ...
H01L 21/677 (2006.01); B60L 13/04 (2006.01); B65G 54/02 (2006.01); C23C 14/54 (2006.01); C23C 14/56 (2006.01); B65G 43/00 (2006.01); C23C 14/50 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01); H01L 51/56 (2006.01); B61B 13/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67709 (2013.01); B60L 13/04 (2013.01); B65G 43/00 (2013.01); B65G 54/02 (2013.01); C23C 14/50 (2013.01); C23C 14/54 (2013.01); C23C 14/564 (2013.01); C23C 14/568 (2013.01); H01L 21/6715 (2013.01); H01L 21/67259 (2013.01); H01L 21/67715 (2013.01); H01L 21/68742 (2013.01); B61B 13/00 (2013.01); B65G 2201/02 (2013.01); H01L 51/56 (2013.01);
Abstract

An apparatus for contactless transportation of a device in a vacuum processing system is described. The apparatus includes: a magnetic transportation arrangement for providing a magnetic levitation force (F) for levitating the device, the magnetic transportation arrangement comprising one or more active magnetic units; a sensor for monitoring a motion of the device, and a controller configured for controlling the one or more active magnetic units based on a signal provided by the sensor.

Find Patent Forward Citations

Aust, Henning. (2022). Apparatus and method for contactless transportation of a device in a vacuum processing system (U.S. Patent No. 11508595). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11508595

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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