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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11508593 B1

PDFFull Text
Date of Patent:
Nov. 22, 2022

Filed:

Oct. 18, 2019

Side storage pods, electronic device processing systems, and methods for operating the same

Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Paul B. Reuter, Austin, TX (US);

Dean C. Hruzek, Cedar Park, TX (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:

Lowenstein Sandler LLP

Primary Examiner:

Nicolas A Arnett

Int. Cl.
CPC ...
H01L 21/673 (2006.01); H01L 21/677 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67389 (2013.01); H01L 21/67017 (2013.01); H01L 21/67167 (2013.01); H01L 21/67196 (2013.01); H01L 21/67383 (2013.01); H01L 21/67393 (2013.01); H01L 21/67769 (2013.01); H01L 21/67772 (2013.01); B01D 2253/102 (2013.01); H01L 21/67766 (2013.01);
Abstract

Electronic device processing systems including an equipment front end module with at least one side storage pod are described. The side storage pod has a chamber including a top substrate holder and a bottom substrate holder. In some embodiments, an exhaust port is located at a midpoint between the top substrate holder and the bottom substrate holder. Methods and systems in accordance with these and other embodiments are also disclosed.

Find Patent Forward Citations

Reuter, Paul. (2022). Side storage pods, electronic device processing systems, and methods for operating the same (U.S. Patent No. 11508593). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11508593

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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