The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 22, 2022
Filed:
May. 10, 2018
Applicant:
Mico Ceramics Ltd., Anseong, KR;
Inventors:
Je Ho Chae, Pyeongtaek, KR;
Hyo Sung Park, Anseong, KR;
Duck Won Ahn, Yesan-gun, KR;
Tae Hee Kang, Goyang, KR;
Assignee:
MiCo Ceramics Ltd., Anseong, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/324 (2006.01); C04B 35/581 (2006.01); H01L 21/687 (2006.01); H01L 21/02 (2006.01); C04B 35/64 (2006.01); H01L 21/67 (2006.01); C04B 35/645 (2006.01);
U.S. Cl.
CPC ...
H01L 21/324 (2013.01); C04B 35/581 (2013.01); C04B 35/64 (2013.01); H01L 21/02 (2013.01); H01L 21/02172 (2013.01); H01L 21/67103 (2013.01); H01L 21/68757 (2013.01); C04B 35/645 (2013.01); C04B 2235/3225 (2013.01); C04B 2235/3232 (2013.01); C04B 2235/3865 (2013.01); C04B 2235/404 (2013.01); C04B 2235/5436 (2013.01); C04B 2235/72 (2013.01); C04B 2235/9607 (2013.01);
Abstract
An aluminum nitride sintered body contains 1 to 5% by weight of yttrium oxide (YO), 10 to 100 ppm by weight of titanium (Ti), and the balance being aluminum nitride (AlN). Accordingly, a volume resistance value and thermal conductivity at a high temperature are improved, and the generation of impurities during a semiconductor manufacturing process can be suppressed.