The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 22, 2022
Filed:
Aug. 03, 2020
Fujifilm Electronic Materials U.s.a., Inc., N. Kingstown, RI (US);
William A. Wojtczak, Mesa, AZ (US);
Kazutaka Takahashi, Gilbert, AZ (US);
Atsushi Mizutani, Shizuoka, JP;
Thomas Dory, Gilbert, AZ (US);
Keeyoung Park, Gilbert, AZ (US);
Fujifilm Electronic Materials U.S.A., Inc., N. Kingstown, RI (US);
Abstract
This disclosure relates to methods and compositions for treating a semiconductor substrate having a pattern disposed on a surface of the substrate. The methods can include a) supplying a sublimating material to a substrate having a pattern disposed on a surface thereof; b) maintaining the sublimating material on the surface for a time sufficient to modify the surface; c) solidifying the sublimating material on the surface; and d) removing by sublimation the sublimating material disposed on the surface.