Method for detecting defects in semiconductor device

Abstract

A method for detecting defects in a semiconductor device includes pre-training a pre-trained convolutional neural network (CNN) model using a sampled clean data set extracted from a first data set; training a normal convolutional neural network model and a label-noise convolutional neural network model using first data of the first data set and the pre-trained convolutional neural network model. The method also includes outputting a first prediction result on whether second data of a second data set is good or bad using the second data and the normal convolutional neural network model; and outputting a second prediction result on whether second data is good or bad using the second data and the label-noise convolutional neural network model. The first prediction result is compared with the second prediction result to perform noise correction when there is a label difference. Third data created as results of the noise correction is added to the sampled clean data set. The normal convolutional neural network model and the label-noise convolutional neural network model are additionally using the sampled clean data set with the third data added.