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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11506978 B1

PDFFull Text
Date of Patent:
Nov. 22, 2022

Filed:

Mar. 27, 2017

Negative type photosensitive composition curable at low temperature

Applicant:

AZ Electronic Materials (Luxembourg) S.a.r.l., Luxembourg, LU;

Inventors:

Motoki Misumi, Otsu, JP;

Daishi Yokoyama, Kakegawa, JP;

Katsuto Taniguchi, Kakegawa, JP;

Masahiro Kuzawa, Nagoya, JP;

Assignee:

MERCK PATENT GMBH, Darmstadt, DE;

Attorney:

Faegre Drinker Biddle & Reath LLP

Primary Examiner:

Peter L Vajda

Assistant Examiner:

Nicholas E Brown

Int. Cl.
CPC ...
G03F 7/075 (2006.01); C08F 230/08 (2006.01); C08G 77/14 (2006.01); C08G 77/20 (2006.01); G03F 7/00 (2006.01); G03F 7/031 (2006.01); G03F 7/32 (2006.01); G03F 7/40 (2006.01); G03F 7/16 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0757 (2013.01); C08F 230/085 (2020.02); C08G 77/14 (2013.01); C08G 77/20 (2013.01); G03F 7/0007 (2013.01); G03F 7/031 (2013.01); G03F 7/0758 (2013.01); G03F 7/162 (2013.01); G03F 7/168 (2013.01); G03F 7/2004 (2013.01); G03F 7/322 (2013.01); G03F 7/40 (2013.01);
Abstract

[Object] To provide a negative type photosensitive composition developable with a low concentration alkali developer and capable of forming a cured film excellent in transparency, in chemical resistance and in environmental durability; and further to provide a pattern-formation method employing the composition. [Means] The present invention provides a negative type photosensitive composition comprising: (I) an alkali-soluble resin, namely, a polymer comprising a carboxyl-containing polymerization unit and an alkoxysilyl-containing polymerization unit, (II) a polysiloxane, (III) a compound having two or more (meth)acryloyloxy groups, (IV) (i) a silicone derivative having a particular structure and/or (ii) a compound having two or more epoxy groups, (V) a polymerization initiator, and (VI) a solvent.

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