The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 22, 2022

Filed:

Dec. 13, 2017
Applicant:

Lg Chem, Ltd., Seoul, KR;

Inventors:

Mi Sook Lee, Daejeon, KR;

Se Jin Ku, Daejeon, KR;

No Jin Park, Daejeon, KR;

Jung Keun Kim, Daejeon, KR;

Je Gwon Lee, Daejeon, KR;

Eun Young Choi, Daejeon, KR;

Hyung Ju Ryu, Daejeon, KR;

Sung Soo Yoon, Daejeon, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); H01L 21/027 (2006.01); H01L 21/033 (2006.01); C08L 53/00 (2006.01); H01L 51/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0002 (2013.01); C08L 53/00 (2013.01); G03F 7/00 (2013.01); H01L 21/0271 (2013.01); H01L 21/0273 (2013.01); H01L 21/0337 (2013.01); H01L 51/00 (2013.01);
Abstract

The present application relates to a method for preparing a patterned substrate. The method may be applied to a process of manufacturing devices such as, for example, electronic devices and integrated circuits, or other applications, such as manufacture of integrated optical systems, guidance and detection patterns of magnetic domain memories, flat panel displays, liquid crystal displays (LCDs), thin film magnetic heads or organic light emitting diodes, and the like, and may also be used to build a pattern on a surface used in manufacture of discrete track media, such as integrated circuits, bit-patterned media and/or magnetic storage devices such as hard drives.


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