The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 22, 2022
Filed:
May. 24, 2021
Azbil Corporation, Tokyo, JP;
Yuki Seto, Tokyo, JP;
AZBIL CORPORATION, Tokyo, JP;
Abstract
To provide a pressure sensor element and a pressure sensor that have stable pressure sensitivity without the need for improving the accuracy of alignment between a diaphragm and a holding member, a pressure sensor element includes a thin plate diaphragm, a holding member that holds the diaphragm, and one or more strain resistance gauges that are provided on a first surface of the diaphragm and which change in resistance values according to deformation of the diaphragm, in which the holding member has recesses that, formed on an annular first end surface facing the first surface of the diaphragm, cut out parts of an inner circumference of the first end surface, and the strain resistance gauges are disposed near the regions corresponding to the recesses on the first surface of the diaphragm.