The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 22, 2022

Filed:

Nov. 23, 2020
Applicant:

California Institute of Technology, Pasadena, CA (US);

Inventors:

Jian Xu, Pasadena, CA (US);

Changhuei Yang, South Pasadena, CA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/06 (2006.01); G06T 11/00 (2006.01); G01B 9/02 (2022.01);
U.S. Cl.
CPC ...
G01B 11/0608 (2013.01); G01B 9/02043 (2013.01); G06T 11/005 (2013.01); G06T 2207/10101 (2013.01);
Abstract

A 3-D imaging system including a computer determining a plurality of coherence factors measuring an intensity contrast between a first intensity of a first region of an interference comprising constructive interference between a sample wavefront and a reference wavefront, and a second intensity of a second region of the interference comprising destructive interference between the sample wavefront and the reference wavefront, wherein the interference between a reference wavefront and a reflection from different locations on a surface of an object. From the coherence factors, the computer determines height data comprising heights of the surface with respect to an x-y plane perpendicular to the heights and as a function of the locations in the x-y plane. The height data is useful for generating a three dimensional topological image of the surface.


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