The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 22, 2022

Filed:

Jun. 18, 2019
Applicant:

Fujikin Incorporated, Osaka, JP;

Inventors:

Tatsuhiko Sato, Osaka, JP;

Tomohiro Nakata, Osaka, JP;

Tsutomu Shinohara, Osaka, JP;

Takeru Miura, Osaka, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F16K 7/16 (2006.01); C23C 16/455 (2006.01); F16K 27/02 (2006.01); H01L 21/67 (2006.01); F16K 1/42 (2006.01);
U.S. Cl.
CPC ...
F16K 7/16 (2013.01); C23C 16/45544 (2013.01); F16K 1/427 (2013.01); F16K 27/0236 (2013.01); H01L 21/67017 (2013.01);
Abstract

A valve device includes a valve body; a cylindrical member provided in an accommodation recess and communicating with the first flow path; a valve seat supported by the cylindrical member; a seal member interposed between the periphery of the opening of first flow path on the bottom surface of the accommodation recess and the lower end portion of the cylindrical member; an annular plate which is flexible, air-tightly or liquid-tightly fixed to an annular support portion formed on the inner peripheral surface of the accommodation recess, air-tightly or liquid-tightly fixed to an annular support portion formed on the outer peripheral surface of the cylindrical member and has a plurality of openings communicating with the second flow path; and a diaphragm that moves between an open position at which the diaphragm does not contact the valve seat and a closed position at which the diaphragm contacts the valve seat.


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