The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 22, 2022

Filed:

Dec. 28, 2017
Applicant:

Nikon Corporation, Tokyo, JP;

Inventors:

Naoya Ishizawa, Saitama, JP;

Taro Ueno, Tokyo, JP;

Ryo Kobayashi, Kawasaki, JP;

Tetsuomi Takasaki, Sagamihara, JP;

Assignee:

NIKON CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01L 3/00 (2006.01);
U.S. Cl.
CPC ...
B01L 3/502753 (2013.01); B01L 2300/04 (2013.01); B01L 2300/0681 (2013.01); B01L 2300/0887 (2013.01); B01L 2300/14 (2013.01);
Abstract

A fluid device includes a substrate and a gas-liquid separating filter, the substrate has a flow path through which a solution flows, a reservoir, in which the solution is accommodated, connected to the flow path, an injection hole configured to connect the reservoir to the outside, and an air introduction hole branched off from the injection hole and connected to the outside, and the gas-liquid separating filter is disposed in a path of the air introduction hole, allows passage of a gas flowing through the air introduction hole, and prevents passage of a liquid flowing through the air introduction hole.


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