The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 22, 2022
Filed:
Apr. 20, 2018
Applicant:
Kanken Techno Co., Ltd., Nagaokakyo, JP;
Inventors:
Michihiko Yanagisawa, Nagaokakyo, JP;
Tsutomu Tsukada, Nagaokakyo, JP;
Hiroshi Imamura, Nagaokakyo, JP;
Assignee:
KANKEN TECHNO CO., LTD., Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 53/46 (2006.01); B01D 53/74 (2006.01); F04B 15/04 (2006.01); F04D 17/16 (2006.01);
U.S. Cl.
CPC ...
B01D 53/46 (2013.01); B01D 53/74 (2013.01); B01D 2257/40 (2013.01); B01D 2258/0216 (2013.01); B01D 2259/818 (2013.01); F04B 15/04 (2013.01); F04D 17/168 (2013.01);
Abstract
The present invention provides an energy-efficient method and apparatus that can achieve exhaust gas abatement with a minimum use of diluent nitrogen gas. More specifically, the present invention is directed to a method and apparatus for exhaust gas abatement under reduced pressure, in which an exhaust gas supplied from an exhaust gas source via a vacuum pump is decomposed by heat of a high-temperature plasma under a reduced pressure.