The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 15, 2022

Filed:

Jan. 05, 2021
Applicant:

Fuji Electric Co., Ltd., Kawasaki, JP;

Inventor:

Yoshiaki Toyoda, Matsumoto, JP;

Assignee:

FUJI ELECTRIC CO., LTD., Kawasaki, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/06 (2006.01); H01L 29/78 (2006.01); H01L 29/66 (2006.01); H01L 27/088 (2006.01); H01L 21/762 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0615 (2013.01); H01L 21/76224 (2013.01); H01L 27/088 (2013.01); H01L 29/66734 (2013.01); H01L 29/7813 (2013.01);
Abstract

A method of manufacturing a semiconductor integrated circuit includes forming a body region having a second conductivity type in an upper portion of a support layer having a first conductivity type and forming a well region having a second conductivity type in an upper portion of the support layer. An output side buried layer is formed inside the body region and a circuit side buried layer is formed inside the well region. A trench is dug to penetrate through the body region and a control electrode structure is buried in the gate trench. First and second terminal regions are formed on the well region and an output terminal region is formed on the body region. An output stage element having the output terminal region is controlled by a circuit element including the first and second terminal regions.


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