The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2022
Filed:
Mar. 27, 2019
Soitec, Bernin, FR;
Djamel Belhachemi, Saint Martin d'heres, FR;
Soitec, Bernin, FR;
Abstract
A layer transfer process comprises depositing a first, temporary bonding layer of SOG comprising methylsiloxane by spin coating on a surface comprising substantially no silicon of an initial substrate, and applying a first heat treatment for densifying the first, temporary bonding layer. An intermediate substrate is joined to the initial substrate, and then thinned A second bonding layer of SOG comprising silicate or methylsilsesquioxane is deposited by spin coating on a surface of the thinned initial substrate and/or a final substrate, and a second heat treatment is applied for densifying the second bonding layer. The thinned initial substrate and the final substrate and then joined, and the intermediate substrate is detached thereafter. The process may be carried out at temperatures below 300° C. to avoid damaging components that may be present in the substrates.