The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2022
Filed:
May. 08, 2017
Applicant:
Murata Machinery, Ltd., Kyoto, JP;
Inventors:
Tatsuo Tsubaki, Ise, JP;
Takashi Yamaji, Ise, JP;
Assignee:
MURATA MACHINERY, LTD., Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/673 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67389 (2013.01); H01L 21/673 (2013.01); H01L 21/677 (2013.01); H01L 21/67733 (2013.01);
Abstract
A container storage includes a purger that supplies a purge gas into a stored container and an evacuator that is disposed near a lid of the container and evacuates an atmosphere around the lid.