The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2022
Filed:
Nov. 09, 2020
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
Dieter Pierreux, Dilbeek, BE;
Anna Trovato, Woluwe Saint Pierre, BE;
Kelly Houben, Lubbeek, BE;
Steven van Aerde, Tielt-Winge, BE;
Bert Jongbloed, Oud-Heverlee, BE;
Wilco A. Verweij, Nijkerk, NL;
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 29/66 (2006.01); H01L 29/78 (2006.01); H01L 21/331 (2006.01); H01L 27/092 (2006.01); H01L 23/522 (2006.01); H01L 23/532 (2006.01); H01L 21/768 (2006.01); H01L 21/311 (2006.01); H01L 21/285 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0262 (2013.01); H01L 21/02532 (2013.01); H01L 21/28525 (2013.01); H01L 21/31116 (2013.01); H01L 21/76879 (2013.01); H01L 23/5226 (2013.01); H01L 23/53271 (2013.01); H01L 21/02576 (2013.01); H01L 21/02579 (2013.01);
Abstract
Method for filling a gap, comprising