The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2022
Filed:
Nov. 13, 2018
Applicant:
International Business Machines Corporation, Armonk, NY (US);
Inventors:
Dario Goldfarb, Dobbs Ferry, NY (US);
Bharat Kumar, Tarrytown, NY (US);
Ekmini Anuja De Silva, Slingerlands, NY (US);
Jing Guo, Niskayuna, NY (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/075 (2006.01); C08G 77/00 (2006.01); C09J 183/04 (2006.01); H01L 21/027 (2006.01); H01L 21/033 (2006.01); G03F 7/16 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0755 (2013.01); C08G 77/00 (2013.01); C09J 183/04 (2013.01); G03F 7/0751 (2013.01); H01L 21/0273 (2013.01);
Abstract
An adhesion promoter composition comprising at least one of the following compounds: (a) a cyclic compound having the formula: (b) a non-cyclic compound having the formula: wherein Rand Reach independently represents a non-photoactive phenyl, a photoactive phenyl or a C-Calkyl; Rrepresents a non-photoactive phenyl; Rrepresents a photoactive phenyl; W represents Si or Ge; n represents an integer of value greater than 1;m represents an integer between 0 and 1.