The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 15, 2022

Filed:

Jun. 24, 2021
Applicant:

Fuji Electric Co., Ltd., Kanagawa, JP;

Inventor:

Tetsutaro Imagawa, Matsumoto, JP;

Assignee:

FUJI ELECTRIC CO., LTD., Kanagawa, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/26 (2020.01); H01L 29/08 (2006.01); H01L 29/10 (2006.01); H01L 27/06 (2006.01); H01L 29/739 (2006.01); H01L 29/861 (2006.01); H01L 29/40 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2617 (2013.01); H01L 27/0664 (2013.01); H01L 29/0834 (2013.01); H01L 29/1095 (2013.01); H01L 29/407 (2013.01); H01L 29/7397 (2013.01); H01L 29/8613 (2013.01);
Abstract

Provided is a testing apparatus for testing a semiconductor device including a first main terminal to which a first power source voltage is applied and a second main terminal to which a second power source voltage is applied, comprising: a condition setting unit for setting a changing speed of a terminal voltage of the first main terminal at turn-off of the device; an operation controlling unit for turning off the device under a condition set by the condition setting unit; and a determining unit for screening the device based on an operation result of the device, wherein: a time waveform of the terminal voltage at turn-off of the device includes a maximum changing point where a changing speed becomes maximum; and the condition setting unit sets the changing speed at a first set voltage higher than a voltage at the maximum changing point, to a predetermined value.


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