The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2022
Filed:
Oct. 11, 2019
Applicant:
Shimadzu Corporation, Kyoto, JP;
Inventors:
Kanji Kobayashi, Kyoto, JP;
Masato Hirade, Kyoto, JP;
Assignee:
Shimadzu Corporation, Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 30/20 (2010.01); G01Q 10/02 (2010.01); G01Q 70/02 (2010.01);
U.S. Cl.
CPC ...
G01Q 30/20 (2013.01); G01Q 10/02 (2013.01); G01Q 70/02 (2013.01);
Abstract
A surface analysis device is provided with a sample stage for placing a sample thereon, a cantilever to be arranged to face the sample stage, and a cantilever drive unit for driving the cantilever. The drive mechanism is configured, when taking out the sample stage, to shift the sample stage relative to a measurement unit so that the measurement unit and the sample stage separate from each other in a first direction in which the cantilever and the sample stage face each other, and then slidably move the stage in a direction intersecting with the first direction.