The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2022
Filed:
Oct. 06, 2020
Applicant:
Azbil Corporation, Tokyo, JP;
Inventor:
Hirofumi Tojo, Chiyoda-ku, JP;
Assignee:
AZBIL CORPORATION, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G01L 9/04 (2006.01); G01L 19/04 (2006.01); G01L 9/00 (2006.01);
U.S. Cl.
CPC ...
G01L 9/0051 (2013.01); G01L 9/04 (2013.01);
Abstract
A pressure sensor includes a sensor chip. The sensor chip has two diaphragms, recessed portions that serve as first pressure inlet chambers disposed so as to respectively adjoin top surfaces of the diaphragms, and recessed portions that serve as second pressure inlet chambers disposed so as to respectively adjoin bottom surfaces of the diaphragms. A cavity is provided in the sensor chip such that, when a difference between pressures respectively applied to a top surface and bottom surface of the diaphragm is zero, an output voltage of a Wheatstone bridge circuit made up of strain gauges provided in the diaphragm is zero.