The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2022
Filed:
Nov. 13, 2019
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Chuang-Chia Lin, San Ramon, CA (US);
Upendra Ummethala, Cupertino, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 3/443 (2006.01); H01J 37/32 (2006.01); G01N 21/31 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
G01J 3/443 (2013.01); G01N 21/31 (2013.01); H01J 37/32743 (2013.01); H01L 22/26 (2013.01); H01J 2237/334 (2013.01);
Abstract
Embodiments disclosed herein include an optical sensor system for use in plasma processing tools. In an embodiment, the optical sensor system, comprises an optically clear body with a first surface and a second surface facing away from the first surface. In an embodiment, the optically clear body further comprises a third surface that is recessed from the second surface. In an embodiment, the optical sensor system further comprises a target over the third surface and a first reflector to optically couple the first surface to the target.