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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11499666 B1

PDFFull Text
Date of Patent:
Nov. 15, 2022

Filed:

May. 01, 2019

Precision dynamic leveling mechanism with long motion capability

Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Jason M. Schaller, Austin, TX (US);

Michael P. Rohrer, Cedar Park, TX (US);

Tuan Anh Nguyen, San Jose, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:

Patterson + Sheridan, LLP

Primary Examiner:

Keath T Chen

Assistant Examiner:

Margaret Klunk

Int. Cl.
CPC ...
F16M 11/18 (2006.01); F16M 11/12 (2006.01); F16F 1/12 (2006.01); C23C 16/44 (2006.01); H01L 21/687 (2006.01); F16M 11/04 (2006.01); H01L 21/68 (2006.01);
U.S. Cl.
CPC ...
F16M 11/18 (2013.01); C23C 16/44 (2013.01); F16F 1/12 (2013.01); F16M 11/046 (2013.01); F16M 11/121 (2013.01); H01L 21/68 (2013.01); H01L 21/68764 (2013.01); F16F 2228/08 (2013.01); F16M 2200/041 (2013.01);
Abstract

Embodiments described herein relate to a precision dynamic leveling mechanism for repeatedly positioning the pedestal within a process. The precision dynamic leveling mechanism includes bearing assemblies. Bearing assemblies having inner races forced against a pedestal assembly carrier and outer races forced against a guide adaptor provide nominal clearance between the inner races and outer races to allow the inner races and the outer races to slide on each other with minimal or no radial motion.

Find Patent Forward Citations

Schaller, Jason. (2022). Precision dynamic leveling mechanism with long motion capability (U.S. Patent No. 11499666). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11499666

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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