The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2022
Filed:
Jun. 24, 2020
Seiko Epson Corporation, Tokyo, JP;
Abstract
A diaphragm compressor includes first structure having a first pressing part, a first diaphragm, and a first substrate partially separated from the first diaphragm and partially joined to the first diaphragm, a second structure having a second pressing part, a second diaphragm, and a second substrate partially separated from the second diaphragm and partially joined to the second diaphragm, the first structure and the second structure being stacked in a stacking direction in which the first diaphragm and the first substrate are stacked, wherein the first pressing part is placed at sides of the first diaphragm opposite to the first substrate, and a first separation portion between the first diaphragm and the first substrate is part of a first channel in which a fluid flows, the second pressing part is placed at sides of the second diaphragm opposite to the second substrate, and a second separation portion between the second diaphragm and the second substrate is part of a second channel in which a fluid flows, the first channel and the second channel are placed in series, as seen from the stacking direction, the first pressing part overlaps the second pressing part, and a buffer chamber holding the fluid is provided between the first channel and the second channel.