The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2022
Filed:
Aug. 09, 2017
Applicants:
Flisom Ag, Duebenforf, CH;
Lorenzo Parrini, Duebendorf, CH;
Inventors:
Bernhard Schlaeppi, Zurich, CH;
Michael Akermann, Zurich, CH;
Assignee:
FLISOM AG, Niederhasli, CH;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/56 (2006.01); C23C 14/54 (2006.01); C23C 14/50 (2006.01); B05C 5/02 (2006.01); C23C 14/24 (2006.01);
U.S. Cl.
CPC ...
C23C 14/562 (2013.01); B05C 5/0245 (2013.01); C23C 14/24 (2013.01); C23C 14/50 (2013.01); C23C 14/548 (2013.01); C23C 14/568 (2013.01);
Abstract
A deposition system is provided for guiding a flexible substrate along a deposition path. The deposition system includes a payout hub for unwinding the flexible substrate; a pickup hub for winding the flexible substrate; one or more evaporation sources (); one or more electrodes () spaced apart from the one or more evaporation sources in a first direction; one or more measurement devices (); and a controller () configured to adjust one or more voltages provided to the one more electrodes.