The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 08, 2022
Filed:
Apr. 05, 2021
Applicant:
Acer Incorporated, New Taipei, TW;
Inventors:
Jui-Chieh Hsiang, New Taipei, TW;
Chih-Chiang Chen, New Taipei, TW;
Assignee:
ACER INCORPORATED, New Taipei, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/68 (2006.01); H01L 21/687 (2006.01); B81C 99/00 (2010.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01); H01L 21/683 (2006.01); H01L 33/00 (2010.01);
U.S. Cl.
CPC ...
H01L 21/68707 (2013.01); B81C 99/002 (2013.01); H01L 21/67144 (2013.01); H01L 21/67712 (2013.01); H01L 21/67721 (2013.01); H01L 21/6831 (2013.01); H01L 33/005 (2013.01);
Abstract
A method of transferring a micro device using a micro device transfer head is provided. The micro device transfer head includes a base arm, a first side arm and a second side arm, and the micro device is fabricated on a substrate. The method includes moving the first side arm within a sensing range of the micro device, charging the first side arm for drawing the micro device away from the substrate to move towards a space between the first side arm and the second side arm, and shortening a distance between the first side arm and the second side arm for clamping the micro device.