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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11495458 B1

PDFFull Text
Date of Patent:
Nov. 08, 2022

Filed:

Jan. 07, 2021

Manufacturing method and semiconductor element

Applicant:

Nec Corporation, Tokyo, JP;

Inventor:

Tomo Tanaka, Tokyo, JP;

Assignee:

NEC CORPORATION, Tokyo, JP;

Attorney:

Sughrue Mion, PLLC

Primary Examiner:

Eduardo A Rodela

Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 29/16 (2006.01); H01L 31/0352 (2006.01); H01L 27/146 (2006.01); H01L 31/18 (2006.01); H01L 29/04 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02527 (2013.01); H01L 27/146 (2013.01); H01L 29/045 (2013.01); H01L 29/1606 (2013.01); H01L 31/035272 (2013.01); H01L 31/18 (2013.01);
Abstract

In order to enable simple removal of a substrate used for manufacturing a semiconductor element, a manufacturing method includes forming a graphene layer on a substrate portion formed of a semiconductor, forming an element portion on the graphene layer, the element portion including a semiconductor layer directly formed on the graphene layer, which takes over crystal information relating to the substrate portion when the semiconductor layer is formed on the substrate portion without intermediation of the graphene layer, and performing cutting-off between the substrate portion and the element portion at the graphene layer.

Find Patent Forward Citations

Tanaka, Tomo. (2022). Manufacturing method and semiconductor element (U.S. Patent No. 11495458). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11495458

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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