Three-dimensional shape measuring apparatus, three-dimensional shape measuring method, three-dimensional shape measuring computer-readable storage medium, and three-dimensional shape measuring computer-readable storage device

Abstract

A three-dimensional shape measuring apparatus includes a stage that includes a translation stage part having a placement surface on which a measurement object is placed and capable of translating the placement surface; an illuminator that includes independently controllable and two-dimensionally-arranged projection devices, and illuminates the measurement object, which is placed on the stage, with measuring light having a predetermined projection pattern having alternating light-and-dark intervals; a photoreceptor that receives measuring light reflected by the measurement object illuminated by the illuminator, and to generate a projection pattern image; and a movement controller that controls the translational movement of the translation stage part by a moving pitch smaller than the minimum width of the projection pattern which can be projected on the stage by independently controlling the projection devices of the illuminator.