The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 01, 2022
Filed:
Dec. 30, 2018
Applicant:
Texas Instruments Incorporated, Dallas, TX (US);
Inventors:
Jeronimo Segovia Fernandez, San Jose, CA (US);
Peter Smeys, San Jose, CA (US);
Ting-Ta Yen, San Jose, CA (US);
Assignee:
TEXAS INSTRUMENTS INCORPORATED, Dallas, TX (US);
Primary Examiner:
Int. Cl.
CPC ...
H03H 3/02 (2006.01); H03H 9/17 (2006.01); H03H 9/13 (2006.01); C23C 16/455 (2006.01); C23C 14/35 (2006.01); H01L 41/316 (2013.01); H01L 41/29 (2013.01);
U.S. Cl.
CPC ...
H03H 9/175 (2013.01); C23C 14/35 (2013.01); C23C 16/45525 (2013.01); H03H 3/02 (2013.01); H03H 9/13 (2013.01); H01L 41/29 (2013.01); H01L 41/316 (2013.01); H03H 2003/025 (2013.01);
Abstract
A resonator includes a substrate, an acoustic Bragg mirror disposed above the substrate, and a bottom metal layer disposed above the acoustic Bragg mirror. The resonator also includes a piezoelectric plate disposed above the bottom metal layer. The resonator further includes a top metal layer disposed above the piezoelectric plate. The top metal layer comprises multiple fingers within a single plane and the width of each of the fingers is between 75%-125% of a thickness of the piezoelectric plate.