The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 01, 2022

Filed:

Sep. 25, 2018
Applicants:

Commissariat À L'énergie Atomique ET Aux Énergies Alternatives, Paris, FR;

Centre National DE LA Recherche Scientifique, Paris, FR;

Universite D'orleans, Orleans, FR;

Inventors:

Julien Vulliet, Chambray-les-Tours, FR;

Anne-Lise Thomann, Menestreau-en-Villette, FR;

Pierre-Laurent Coddet, Olivet, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/58 (2006.01); H01M 8/1253 (2016.01); C23C 14/08 (2006.01); C23C 14/35 (2006.01); H01M 8/126 (2016.01);
U.S. Cl.
CPC ...
H01M 8/1253 (2013.01); C23C 14/083 (2013.01); C23C 14/35 (2013.01); C23C 14/5853 (2013.01); H01M 8/126 (2013.01);
Abstract

A method of manufacturing by magnetron cathode sputtering an electrolyte film for use in solid oxide cells (SOC). This method comprises the steps consisting of heating a substrate to a temperature ranging from 200° C. to 1200° C.; followed by subjecting the substrate to at least two treatment cycles, each treatment cycle comprising: 1) depositing one layer of a metal precursor on the substrate by magnetron cathode sputtering of a target made up of the metal precursor, the sputtering being carried out under elemental sputtering conditions; followed by 2) oxidation-crystallisation of the metal precursor forming the layer deposited on the substrate in the presence of oxygen to obtain the transformation of the metal precursor into the electrolyte material; and in that the substrate is kept at a temperature ranging from 200° C. to 1200° C. for the entire duration of each treatment cycle.


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