IDiyas

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11488991 B1

PDFFull Text
Date of Patent:
Nov. 01, 2022

Filed:

Jul. 24, 2020

Manufacturing apparatus and manufacturing method using the same

Applicant:

Samsung Display Co., Ltd., Yongin-si, KR;

Inventors:

Soo Young Jung, Hwaseong-si, KR;

Joon Hyung Kim, Asan-si, KR;

Jeong Mok Kim, Asan-si, KR;

Chung Hyuk Lee, Hwaseong-si, KR;

Sung Jae Jung, Yongin-si, KR;

Assignee:

SAMSUNG DISPLAY CO., LTD., Yongin-si, KR;

Attorney:

Kile Park Reed & Houtteman PLLC

Primary Examiner:

Alexander G Ghyka

Int. Cl.
CPC ...
H01L 27/12 (2006.01); H01L 21/67 (2006.01); H01L 21/02 (2006.01); H01L 29/786 (2006.01); H01L 29/66 (2006.01); H01L 21/687 (2006.01); H01L 27/32 (2006.01);
U.S. Cl.
CPC ...
H01L 27/1274 (2013.01); H01L 21/02532 (2013.01); H01L 21/02592 (2013.01); H01L 21/02675 (2013.01); H01L 21/67115 (2013.01); H01L 21/68735 (2013.01); H01L 27/1222 (2013.01); H01L 29/66757 (2013.01); H01L 29/78675 (2013.01); H01L 27/3262 (2013.01);
Abstract

A manufacturing apparatus and a manufacturing method are provided. A manufacturing apparatus includes a chamber, and a stage disposed in the chamber. The stage includes an upper surface on which a target substrate is disposed, a lower surface opposite to the upper surface, a first side surface extending between the upper surface and the lower surface in a first direction, and a second side surface extending between the upper surface and the lower surface in a second direction perpendicular to the first direction. The first side surface is in a round shape, and at least a portion of the first side surface is convex toward an outside of the stage.

Find Patent Forward Citations

Loading…