The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 01, 2022
Filed:
Sep. 05, 2016
Eugene Technology Co., Ltd., Yongin-Si, KR;
Cha Young Yoo, Suwon-Si, KR;
Sung Tae Je, Yongin-Si, KR;
Kyu Jin Choi, Yongin-Si, KR;
Ja Dae Ku, Suwon-Si, KR;
Jun Kim, Yongin-Si, KR;
Bong Ju Jung, Hwaseong-Si, KR;
Kyung Seok Park, Hwaseong-Si, KR;
Yong Ki Kim, Osan-Si, KR;
Jae Woo Kim, Bucheon-Si, KR;
Abstract
In accordance with an exemplary embodiment, a substrate processing apparatus includes: a tube assembly having an inner space in which substrates are processed and assembled by laminating a plurality of laminates, each of which includes an injection part and an exhaust hole; a substrate holder configured to support the plurality of substrates in a multistage manner in the inner space; a supply line connected to one injection part of the plurality of laminates to supply a process gas; and an exhaust line connected to one of a plurality of exhaust holes to exhaust the process gas, and the substrate processing apparatus that has a simple structure and induces a laminar flow of the process gas to uniformly supply the process gas to a top surface of the substrate.