The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 01, 2022

Filed:

Apr. 26, 2020
Applicant:

Jsw Aktina System Co., Ltd., Yokohama, JP;

Inventor:

Hiroaki Imamura, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/268 (2006.01); H01L 21/677 (2006.01); H01L 21/02 (2006.01); G01N 21/17 (2006.01); G01N 21/01 (2006.01); B23K 26/03 (2006.01); B23K 26/70 (2014.01);
U.S. Cl.
CPC ...
H01L 21/268 (2013.01); B23K 26/032 (2013.01); B23K 26/705 (2015.10); G01N 21/01 (2013.01); G01N 21/17 (2013.01); H01L 21/02675 (2013.01); H01L 21/677 (2013.01); G01N 2021/0106 (2013.01);
Abstract

A laser irradiation apparatus includes: a laser generation apparatus configured to generate first laser light for performing heat treatment of an object to be processed; a measurement-laser emission unit configured to emit linearly-polarized second laser light toward an irradiation area on the object to be processed to which the first laser light is applied; a first polarizing plate configured to let, of the whole reflected light of the second laser light reflected by the object to be processed, a part of the reflected light that has a first polarization direction pass therethrough; and a measurement-laser detection unit configured to detect the reflected light that has passed through the first polarizing plate.


Find Patent Forward Citations

Loading…