The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 01, 2022
Filed:
Dec. 10, 2021
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Andrew Borth, Newberg, OR (US);
Christopher Ramsayer, Beaverton, OR (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
H05K 9/00 (2006.01); H01J 37/32 (2006.01); C23C 16/505 (2006.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32651 (2013.01); C23C 16/45565 (2013.01); C23C 16/505 (2013.01); H01J 37/3244 (2013.01); H01J 37/32899 (2013.01); H05K 9/0049 (2013.01); H01J 37/32183 (2013.01); H01J 2237/0266 (2013.01); H01J 2237/3321 (2013.01);
Abstract
A processing chamber includes an upper surface and a showerhead arranged to supply gases through the upper surface into the processing chamber. At least a portion of the showerhead extends above the upper surface of the processing chamber. A shroud enclosure is arranged on the upper surface of the processing chamber. The shroud enclosure is arranged around the portion of the showerhead extending above the upper surface of the processing chamber and is configured to isolate radio frequency interference generated by the showerhead.