The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 01, 2022
Filed:
May. 08, 2020
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventor:
Hamid Noorbakhsh, Oakland, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32513 (2013.01); H01J 37/32467 (2013.01); H01J 37/32743 (2013.01); H01L 21/67742 (2013.01);
Abstract
Embodiments of process kits for use in a process chamber are provided herein. In some embodiments, a process kit includes a slit door having an arcuate profile and including a first plate coupled to a second plate, wherein the first plate is configured to be coupled to an actuator, and wherein the second plate has a processing volume facing surface that includes silicon.
Noorbakhsh, Hamid. (2022). L-motion slit door for substrate processing chamber (U.S. Patent No. 11488806). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11488806
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile