The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 01, 2022
Filed:
Mar. 24, 2020
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Thai Cheng Chua, Cupertino, CA (US);
Hanh Nguyen, San Jose, CA (US);
Philip Allan Kraus, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01H 37/76 (2006.01); H05H 1/46 (2006.01); H05K 7/20 (2006.01); H01L 35/28 (2006.01);
U.S. Cl.
CPC ...
H01H 37/76 (2013.01); H01L 35/28 (2013.01); H05H 1/46 (2013.01); H05K 7/20409 (2013.01); H05H 2242/20 (2021.05);
Abstract
Embodiments disclosed herein include a high-frequency emission module. In an embodiment, the high-frequency emission module comprises a solid state high-frequency power source, an applicator for propagating high-frequency electromagnetic radiation from the power source, and a thermal break coupled between the power source and the applicator. In an embodiment, the thermal break comprises a substrate, a trace on the substrate, and a ground plane.