The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 01, 2022
Filed:
Sep. 21, 2021
Applicant:
Hisol, Inc., Tokyo, JP;
Inventor:
Hirofumi Yanai, Tokyo, JP;
Assignee:
HiSOL, Inc., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F25B 21/02 (2006.01); G01R 1/04 (2006.01);
U.S. Cl.
CPC ...
G01R 1/0458 (2013.01); F25B 21/02 (2013.01); F25B 2321/023 (2013.01);
Abstract
A chuck unit includes a chuck on which a semiconductor is mounted, a heating part including a heater and configured to heat the chuck, a cooling block configured to cool the heating part by using fluid-cooling, and a Peltier module configured to cool the cooling block. The heater is configured to be energized while the cooling block and the Peltier module are spaced apart from each other, and the heater is configured to be cut off from energization while the cooling block and the Peltier module contact each other.