The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 01, 2022
Filed:
Nov. 07, 2018
Applicant:
Ferrotec Material Technologies Corporation, Tokyo, JP;
Inventors:
Assignee:
FERROTEC MATERIAL TECHNOLOGIES CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C04B 35/488 (2006.01); G01R 1/04 (2006.01); G01R 1/073 (2006.01); C04B 35/584 (2006.01);
U.S. Cl.
CPC ...
C04B 35/488 (2013.01); C04B 35/584 (2013.01); G01R 1/0408 (2013.01); G01R 1/07371 (2013.01); C04B 2235/3244 (2013.01); C04B 2235/3873 (2013.01); C04B 2235/762 (2013.01); C04B 2235/9607 (2013.01);
Abstract
A ceramic contains, in mass percent: SiN: 20.0 to 60.0%, ZrO: 25.0 to 70.0%, and one or more oxides selected from MgO, YO, CeO, CaO, HfO, TiO, AlO, SiO, MoO, CrO, CoO, ZnO, GaO, TaO, NiO, and VO: 5.0 to 15.0%. The ceramic has a coefficient of thermal expansion as high as that of silicon and an excellent mechanical strength, allows fine machining with high precision, and prevents particles from being produced.