The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 2022
Filed:
Mar. 11, 2022
Seiko Epson Corporation, Tokyo, JP;
Tomoki Yokota, Suwa, JP;
Kikuya Morita, Shiojiri, JP;
SEIKO EPSON CORPORATION, Tokyo, JP;
Abstract
In a substrate body of an electro-optical device, a first groove, and a second groove extending in a direction intersecting the first groove are formed. A capacitance element is constituted by a layered film that includes a first conductive film, a dielectric film, and a second conductive film sequentially layered in a region including the first groove and the second groove. When the first groove and the second groove intersect, the intersection becomes wide during etching. However, when the first groove and the second groove do not intersect, such as when the first groove and the second groove are spaced apart, a wide portion is less likely to be generated. Accordingly, the first insulating film easily fills the grooves.