The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 25, 2022

Filed:

Jun. 16, 2021
Applicant:

Cisco Technology, Inc., San Jose, CA (US);

Inventors:

Alexey V. Vert, Clifton Park, NY (US);

Vipulkumar K. Patel, Breinigsville, PA (US);

Mark A. Webster, Bethlehem, PA (US);

Assignee:

Cisco Technology, Inc., San Jose, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 6/122 (2006.01); G02B 6/12 (2006.01); G02B 6/136 (2006.01); G02B 6/293 (2006.01); G02B 6/30 (2006.01);
U.S. Cl.
CPC ...
G02B 6/1225 (2013.01); G02B 6/12004 (2013.01); G02B 6/136 (2013.01); G02B 6/29332 (2013.01); G02B 6/305 (2013.01); G02B 2006/1209 (2013.01); G02B 2006/1213 (2013.01); G02B 2006/12061 (2013.01); G02B 2006/12176 (2013.01);
Abstract

A method includes defining a first waveguide in a first region of an optical device over a first dielectric layer over a silicon on insulator (SOI) substrate of the optical device and disposing a second dielectric layer on the first waveguide and the first dielectric layer of the optical device. The method also includes defining a second region on the second dielectric layer, the first dielectric layer, and the SOI substrate. The second region includes an integrated trench structure defined in the SOI substrate. The method further includes etching the second region to form an etched second region, disposing a third dielectric layer in the etched second region, and disposing a second waveguide on at least the third dielectric layer. The second waveguide is disposed to provide an optical coupling between the second waveguide and the first waveguide.


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