The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 2022
Filed:
Aug. 01, 2018
Applicant:
Tdk Corporation, Tokyo, JP;
Inventor:
Matthias König, Munich, DE;
Assignee:
TDK CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 27/12 (2006.01); B81B 7/00 (2006.01); B81C 1/00 (2006.01); G01N 33/00 (2006.01);
U.S. Cl.
CPC ...
G01N 27/128 (2013.01); B81B 7/0087 (2013.01); B81C 1/00261 (2013.01); G01N 27/123 (2013.01); G01N 33/0014 (2013.01); G01N 33/0016 (2013.01); B81B 2201/0292 (2013.01); G01N 2291/02863 (2013.01);
Abstract
A MEMS gas sensor is disclosed. In an embodiment a MEMS gas sensor includes a carrier having a recess, a gas sensitive element arranged in the recess and a shielding layer at least partially covering the recess.