The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 2022
Filed:
Mar. 27, 2018
Applicant:
J-solution Co., Ltd., Yongin-si, KR;
Inventor:
Seungyong Lee, Hwaseong-si, KR;
Assignee:
J-SOLUTION CO., LTD., Yongin-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16L 53/30 (2018.01); F16L 53/38 (2018.01); F16L 9/18 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
F16L 53/38 (2018.01); F16L 9/18 (2013.01); H01L 21/67017 (2013.01);
Abstract
The present invention relates to a triple pipe heating device for heating an exhaust gas in a semiconductor and LCD manufacturing process, which has a triple pipe structure capable of effectively heating an exhaust gas with only a small amount of heat without using nitrogen gas, is expandable and bendable so as to be easily installed, and is capable of quickly detecting exhaust gas leakage and overheating.