The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 2022
Filed:
Jul. 07, 2020
Pfeiffer Vacuum Gmbh, Asslar, DE;
Agilent Technologies, Inc., Santa Clara, CA (US);
Tobias Stoll, Hohenaar, DE;
Michael Schweighoefer, Schoeffengrund, DE;
Jan Hoffmann, Gruenberg, DE;
James L. Bertsch, Palo Alto, CA (US);
PFEIFFER VACUUM GMBH, Asslar, DE;
AGILENT TECHNOLOGIES, INC., Santa Clara, CA (US);
Abstract
The invention relates to a vacuum system, comprising a vacuum pump, preferably turbomolecular pump, and at least one vacuum chamber, wherein the vacuum pump comprises: at least a first and a second inlet and a common outlet; at least a first and a second pumping stage, each pumping stage comprising at least one rotor element being arranged on a common rotor shaft, wherein the first inlet is connected to an upstream end of the first pumping stage and the second inlet is connected to an upstream end of the second pumping stage; a direction element for preventing a gas flow from a downstream end of the first pumping stage to the second inlet; a conduit having a conduit inlet and a conduit outlet, wherein the conduit inlet is connected to the downstream end of the first pumping stage and the conduit outlet is connected to a location downstream of the second pumping stage; wherein the first inlet and the second inlet of the pump are connected to the same vacuum chamber.