The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 25, 2022

Filed:

Oct. 03, 2019
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Hariklia Deligianni, Alpine, NJ (US);

Bruce B. Doris, Slingerlands, NY (US);

Eugene J. O'Sullivan, Nyack, NY (US);

Naigang Wang, Ossining, NY (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 8/32 (2006.01); H01F 3/02 (2006.01); H01F 3/04 (2006.01); H01F 17/00 (2006.01); H01F 27/24 (2006.01); H01F 41/04 (2006.01); C23C 14/06 (2006.01); C23C 16/06 (2006.01); C23C 14/14 (2006.01); C23C 16/40 (2006.01); C23C 14/10 (2006.01); C23C 16/34 (2006.01); C23C 28/00 (2006.01);
U.S. Cl.
CPC ...
C23C 14/0641 (2013.01); C23C 14/10 (2013.01); C23C 14/14 (2013.01); C23C 16/06 (2013.01); C23C 16/345 (2013.01); C23C 16/401 (2013.01); C23C 28/32 (2013.01); C23C 28/345 (2013.01); H01F 3/02 (2013.01); H01F 3/04 (2013.01); H01F 17/0013 (2013.01); H01F 17/0033 (2013.01); H01F 27/24 (2013.01); H01F 41/046 (2013.01); H01F 2017/0066 (2013.01);
Abstract

Embodiments are directed to a method of forming a magnetic stack arrangement of a laminated magnetic inductor having a high frequency peak quality factor (Q). A first magnetic stack is formed having one or more magnetic layers alternating with one or more insulating layers in a first inner region of a laminated magnetic inductor. A second magnetic stack is formed opposite a surface of the first magnetic stack in an outer region of the laminated magnetic inductor. A third magnetic stack is formed opposite a surface of the second magnetic stack in a second inner region of the laminated magnetic inductor. The insulating layers are formed such that a thickness of an insulating layer in the second magnetic stack is greater than a thickness of an insulating layer in the first magnetic stack.


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