The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 18, 2022

Filed:

Nov. 14, 2017
Applicant:

Samsung Electro-mechanics Co., Ltd., Suwon-si, KR;

Inventors:

Won Han, Suwon-si, KR;

Dae Ho Kim, Suwon-si, KR;

Yong Suk Kim, Suwon-si, KR;

Seung Hun Han, Suwon-si, KR;

Moon Chul Lee, Suwon-si, KR;

Chang Hyun Lim, Suwon-si, KR;

Sung Jun Lee, Suwon-si, KR;

Sang Kee Yoon, Suwon-si, KR;

Tae Yoon Kim, Suwon-si, KR;

Sang Uk Son, Suwon-si, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/02 (2006.01); H03H 9/17 (2006.01); H03H 9/13 (2006.01); H03H 3/02 (2006.01);
U.S. Cl.
CPC ...
H03H 9/02118 (2013.01); H03H 3/02 (2013.01); H03H 9/02015 (2013.01); H03H 9/02157 (2013.01); H03H 9/132 (2013.01); H03H 9/17 (2013.01); H03H 9/173 (2013.01); H03H 9/174 (2013.01); H03H 2003/021 (2013.01); H03H 2003/023 (2013.01);
Abstract

A bulk acoustic wave resonator includes: a substrate; a membrane layer forming a cavity together with the substrate; a lower electrode disposed on the membrane layer; a piezoelectric layer disposed on a flat surface of the lower electrode; and an upper electrode covering a portion of the piezoelectric layer and exposing a side of the piezoelectric layer to air, wherein the piezoelectric layer includes a step portion extended from the side of the piezoelectric layer and disposed on the flat surface of the lower electrode.


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